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CN112278597A
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Packaging film and silicon wafer transport box packaging method
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CN112275671A
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Wafer sorting equipment and wafer sorting method
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CN112242338A
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Load port and front end module capable of maintaining cleanliness of FOUP lid
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CN112233995A
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Auxiliary device for visual inspection of silicon wafer and visual inspection method of silicon wafer
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CN112289700A
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Silicon wafer detection method
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CN112185885A
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Chuck pin for clamping silicon wafer and device for holding silicon wafer
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CN112151432A
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Device and method for clamping silicon wafers stored in silicon wafer box and silicon wafer conveying equipment
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CN112103239A
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Device for clamping silicon wafer in visual detection process of silicon wafer
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CN112103224A
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Cleaning device, method and related apparatus for cleaning silicon wafer undergoing polishing
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CN112103231A
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Wafer cassette loading device and wafer cassette loading method
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CN112091798A
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Angle polishing device and wafer surface damage depth measuring method
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CN112097656A
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Detection system and detection method for edge removal width of wafer back sealing film
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CN112281209A
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Method, system and storage medium for detecting melt leakage
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CN112201568A
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Method and equipment for epitaxial growth of silicon wafer
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CN112192445A
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Tool, device and method for trimming paired grinding pads of double-sided grinding silicon wafer
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CN112160023A
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Method and system for centering seed crystal rotating rod and crucible rotating base
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CN112151423A
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Method and system for depositing back sealing film on silicon wafer
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CN112281207A
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Heat preservation cover for reducing heat loss of crystal pulling furnace and crystal pulling furnace
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CN112151424A
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Method and system for depositing back sealing film on silicon wafer
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CN112048763A
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Polycrystalline silicon secondary feeding device and polycrystalline silicon ingot casting equipment
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