| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 21 |
| # | Industry | |
|---|---|---|
| #1 | Machines | |
| #2 | Machine tools | |
| #3 | Surface technology and coating | |
| #4 | Semiconductors | |
| #5 | Measurement | |
| #6 | Electrical machinery and energy |
| # | Name | Total Patents |
|---|---|---|
| #1 | Von Ammon Wilfried Dr | 4 |
| #2 | Kaeser Maximilian | 3 |
| #3 | Fuchs Paul | 2 |
| #4 | Tomzig Erich Dr | 2 |
| #5 | Mangs Franz | 2 |
| #6 | Nicolesco Claudian R | 1 |
| #7 | Drexler Robert | 1 |
| #8 | Sedlmeier Wolfgang | 1 |
| #9 | Mueller Paul | 1 |
| #10 | Frank Walter | 1 |
| Publication | Filing date | Title |
|---|---|---|
| EP0935134A1 | Apparatus and method for inspecting the edge micro-texture of a semiconductor wafer |