WO2021080094A1
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Raw material supply unit, single crystal silicon ingot growing apparatus comprising same and raw material supply method
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WO2021080093A1
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Raw material supply unit, and apparatus comprising same for growing single-crystal silicon ingot
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WO2021066242A1
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Wafer polishing head, method for manufacturing wafer polishing head, and wafer polishing apparatus comprising same
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KR20210026763A
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Paddle device and Polishing device
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KR20210025825A
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Wafer mounting device and operating method thereof
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KR20210023134A
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Wafer polishing pad manufacturing apparatus and method for manufacturing a wafer polishing pad using the same
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KR20210022263A
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Wafer cleaning apparatus and cleaning method thereof
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KR20210020539A
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Apparatus for removing suspended solids to grow single crystal ingots, single crystal ingot grower applying the apparatus and method thereof
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KR20210020355A
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Manufacturing method of susceptor for wafer
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KR20210020340A
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Flexible substrate cleaning apparatus
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KR20210014956A
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Method for measuring defect of silicon wafer and wafer
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KR20210014953A
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Crucible for ingot grower
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KR20210014963A
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Method for analyzing contamination at surface of wafer
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KR20210014340A
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Method for setting growth temperature of epitaxial layer of wafer and method for growing epitaxial layer
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KR20210011147A
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Wafer Lapping Apparatus
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KR20210011145A
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Driving unit measuring apparatus and silicon single crystal growing apparatus having same
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KR20210011132A
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Poly silicon material dust Removal Apparatus
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KR20210006104A
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Block stocker and Wafer mounting apparatus having the same
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KR20200142233A
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Wafer Inspection Apparatus
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KR20200131507A
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Apparatus for semiconductor substrate cleaning and semiconductor substrate cleaning method using it
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