Semiconductor single crystal ingot dopped by carbon and method of manufacturing the same
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Wafer treatment apparatus and barrel used therein, and wafer treatment method
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Apparatus and method for depositing a material on a large-size substrate
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Method for manufacturing crystal for solar cell by recycling remaining melt
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A susceptor in epitaxial wafer manufacturing apparatus
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Silicon wafer having proximity gettering ability at low-temperature processes and manufacturing method therefor
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Epitaxial wafer with controlled flatness in edge sector and manufacturing method therefor
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Manufacturing method of silicon wafer with controlled bulk micro defects concentration by low-temperature rapid annealing
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Method of fabricating single crystal substrate, method of evaluating single crystal substrate, and single crystal substrate
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Quartz crucible for single crystal grower
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Nitride semiconductor substrate having dislocation blocking layer and manufacturing method thereof
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Nitride semiconductor substrate, method for fabricating the substrate and light emitting diode including the substrate
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Slicing apparatus of ingot for wafer
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A compressor of polishing pad
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Dust collector of semiconductor production arrangement
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Method for melting solid raw material for single crystal growth
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Method of silicon single crystal-growth wherein point defect concentration is controlled and silicon single crystal and wafer fabricated using the same
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Method for measuring resistivity of semiconductor wafers using sample
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A compressor of polishing pad
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Method and apparatus for manufacturing high quality silicon single crystal
