| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 12 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Engines, pumps and turbines | |
| #3 | Medical technology | |
| #4 | Micro-structure and nano-technology | |
| #5 | Semiconductors | |
| #6 | Chemical engineering |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | X-ray microscopes | |
| #3 | Optical systems | |
| #4 | X-ray technique | |
| #5 | Nanostructure applications | |
| #6 | Nonlinear optics | |
| #7 | Cleaning | |
| #8 | Semiconductor devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Soer Wouter Anthon | 12 |
| #2 | Van Herpen Maarten Marinus Johannes Wilhelmus | 8 |
| #3 | Jak Martin Jacobus Johan | 7 |
| #4 | Banine Vadim Yevgenyevich | 4 |
| #5 | Yakunin Andrey Mikhailovich | 2 |
| #6 | Yakunin Andrei Mikhailovich | 2 |
| #7 | Loopstra Erik Roelof | 2 |
| #8 | Kuijpers Petrus Elizabeth Maria | 1 |
| #9 | Gielissen Kurt | 1 |
| #10 | Van Empel Tjarko Adriaan Rudolf | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2011164237A1 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | |
| US2009027637A1 | Debris prevention system and lithographic apparatus |