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Method and device for measuring deviation of optical test surface from target shape
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Projection exposure apparatus for semiconductor lithography with a cooling device
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Optical element module with imaging error correction and position adjustment
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Relay lens e.g. catadioptric microscope objectives, for use with pupil relay system for e.g. projection of pupil, has concave and convex mirrors arranged such that rays path is reflectable at concave mirror and at convex mirror
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Mirror for guiding a radiation beam
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Control pressure adjusting method for pneumatically operatable bellow that is utilized for e.g. positioning lens for manipulator of projection system, involves transmitting working pressure for actuator elements in to control pressure
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Method for cutting a blank from a boule of an ultra-low expansion glass material containing a stria comprises cutting the blank from the boule so that one axis of the blank runs at a specified angle to the preferred direction of the stria
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Vacuum chamber for the reception of a component, comprises a first gas tightly sealable reception area, a reception device for the component, and a second reception area arranged within the first reception area
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Optical reflective component for inserting in illuminating optics of illuminating system for illuminating object field of projection illumination system, has static structures on reflective upper surface
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Facet mirror for use in extreme ultraviolet lithography, has facet which consists of multilayer structure, where multilayer structure is designed for reflection of electromagnetic radiation in extreme ultraviolet wavelength range
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Measuring system for determining the position of a reflective optical component in a micro-lithography projection illumination facility has a unit as a source of light to measure rays
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Optical element for filtering electromagnetic radiations for illuminating system of projection exposure system, has multilayer structure, which is designed for reflection of electromagnetic radiations in extreme ultraviolet wavelength range
