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SHANGHAI MICROELECTRONIC EQUIP

Overview
  • Total Patents
    25
About

SHANGHAI MICROELECTRONIC EQUIP has a total of 25 patent applications. Its first patent ever was published in 2004. It filed its patents most often in China. Its main competitors in its focus markets optics are HORIUCHI TOSHIYUKI, KULICKE & SOFFA LITEQ B V and NIKON CORP KABUSHIKI KAISHA NIKON.

Patent filings in countries

World map showing SHANGHAI MICROELECTRONIC EQUIPs patent filings in countries
# Country Total Patents
#1 China 25

Patent filings per year

Chart showing SHANGHAI MICROELECTRONIC EQUIPs patent filings per year from 1900 to 2020

Focus industries

# Industry
#1 Optics

Top inventors

# Name Total Patents
#1 Yonghui Chen 2
#2 Yuan Zhiyang 2
#3 Zhiyang Yuan 2
#4 Tianhong Yan 2
#5 Liu Yu 1
#6 Haifeng Hu 1
#7 Xuezhi Wei 1
#8 Yang Fengli Liu 1
#9 Juan Li 1
#10 Shu Jianping 1

Latest patents

Publication Filing date Title
CN101071275A Double platform system for rotary exchange
CN101071310A Pneumatic control device and method
CN101067726A Workpiece platform structure and method for raising repeat accuracy of precision processing equipment
CN101067727A Mask loading technology
CN101025574A Batch silicon wafer exposure method
CN101000409A Variable multi-power projection optical system
CN1897453A Method for improving permanent-magnetic linear motor motion precision
CN1858653A Air float support base for regulating air diaphragm two-way rigidity
CN1851526A Projection objective lens optical system
CN1896875A Photoetching equipment
CN1858651A Exposure device
CN1851559A Photoetching machine synchronous sequential control serial data communication method and system and use
CN1831653A Method for correcting plane defect optical projector
CN1794097A Off-axis position aligning system and aligning method in projection exposure device
CN1794095A Coaxial position aligning system and aligning method in projection exposure device
CN1794091A Precision positioning and regulating tool
CN1794090A Off-axis signal treatment method based on linear model
CN1724892A Precision vibration damping and locating device
CN1658075A Exposure device
CN1658074A Multifreedom motion and positioning device