| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 35 | |
| #2 | WIPO (World Intellectual Property Organization) | 4 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Engines, pumps and turbines | |
| #3 | Micro-structure and nano-technology | |
| #4 | Furniture and games | |
| #5 | Electrical machinery and energy | |
| #6 | Semiconductors | |
| #7 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Mann Hans-Juergen | 39 |
| #2 | Ulrich Wilhelm | 9 |
| #3 | Pretorius Marco | 4 |
| #4 | Shafer David | 4 |
| #5 | Singer Wolfgang | 4 |
| #6 | Dodoc Aurelian | 4 |
| #7 | Zellner Johannes | 3 |
| #8 | Gruner Toralf | 2 |
| #9 | Feldmann Heiko | 2 |
| #10 | Kraehmer Daniel | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US2012127566A1 | Magnifying imaging optical system and metrology system with an imaging optical system of this type | |
| US2009021714A1 | Combination stop for catoptric projection arrangement | |
| WO2004010224A2 | Projection objective for a projection exposure apparatus |