|
WO2019045087A1
|
|
Memory device with predetermined start-up value
|
|
WO2019049588A1
|
|
Methods and systems for clamping a substrate
|
|
US2018277334A1
|
|
Aberration correction in charged particle system
|
|
CN110249408A
|
|
Safety chip with sequence number
|
|
CN110325919A
|
|
Adjust component and the substrate exposure system including the adjustment component
|
|
TW201820050A
|
|
Fabricating unique chips using a charged particle multi-beamlet lithography system
|
|
NL2019502A
|
|
Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system
|
|
NL2019503A
|
|
Fabricating unique chips using a charged particle multi-beamlet lithography system
|
|
NL2019504A
|
|
Secure chips with serial numbers
|
|
TW201812429A
|
|
Substrate holding device, method for manufacturing such a device, and apparatus and method for processing or imaging a sample
|
|
NL2018368B1
|
|
Data generation for fabricating unique chips using a charged particle multi-beamlet lithography system
|
|
NL2018196B1
|
|
Control system and method for lithography apparatus
|
|
NL2018108B1
|
|
Adjustment assembly and substrate exposure system comprising such an adjustment assembly
|
|
US2018188659A1
|
|
Adjustment assembly and substrate exposure system comprising such an adjustment assembly
|
|
US10008362B1
|
|
Optical fiber feedthrough device and fiber path arrangement
|
|
NL2018086B1
|
|
Optical fiber feedthrough device and fiber path arrangement
|
|
US2018068047A1
|
|
Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system
|
|
JP2018066894A
|
|
Method and device for positioning substrate on substrate support unit
|
|
GB201617755D0
|
|
Method and apparatus for aligning substrates on a substrate support unit
|
|
US2018113386A1
|
|
Method and apparatus for aligning substrates on a substrate support unit
|
