| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 18 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Micro-structure and nano-technology | |
| #3 | Optics | |
| #4 | Computer technology | |
| #5 | Semiconductors |
| # | Name | Total Patents |
|---|---|---|
| #1 | Wieland Marco Jan-Jaco | 18 |
| #2 | Van Veen Alexander Hendrik Vincent | 12 |
| #3 | Jager Remco | 5 |
| #4 | Steenbrink Stijn Willem Herman Karel | 5 |
| #5 | Van De Peut Teunis | 4 |
| #6 | Kruit Pieter | 4 |
| #7 | Kampherbeek Bert Jan | 3 |
| #8 | Derks Henk | 2 |
| #9 | De Jong Hendrik Jan | 1 |
| #10 | Van Melle Ralph | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2015242563A1 | Enhanced stitching by overlap dose and feature reduction | |
| US2013120724A1 | Method for splitting a pattern for use in a multi-beamlet lithography apparatus | |
| US2012287410A1 | Data path for lithography apparatus | |
| US2012091358A1 | Projection lens arrangement |