| # | Country | Total Patents | |
|---|---|---|---|
| #1 | WIPO (World Intellectual Property Organization) | 5 | |
| #2 | China | 3 | |
| #3 | EPO (European Patent Office) | 3 | |
| #4 | Republic of Korea | 3 | |
| #5 | Taiwan | 2 | |
| #6 | United States | 2 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Micro-structure and nano-technology | |
| #3 | Semiconductors |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Nanostructure applications | |
| #3 | Semiconductor devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Yasuda Hiroshi | 18 |
| #2 | Ooae Yoshihisa | 2 |
| #3 | Murata Hidekazu | 2 |
| #4 | Shibaoka Tatsuya | 2 |
| Publication | Filing date | Title |
|---|---|---|
| WO2021015039A1 | Electron gun device | |
| CN103858211A | Electron beam lithography device and lithographic method | |
| WO2012057166A1 | Electron lens and the electron beam device | |
| KR20140044310A | Electron gun and electron beam device |