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LEICA LITHOGRAPHY SYSTEMS LTD

Overview
  • Total Patents
    14
About

LEICA LITHOGRAPHY SYSTEMS LTD has a total of 14 patent applications. Its first patent ever was published in 1993. It filed its patents most often in United Kingdom, WIPO (World Intellectual Property Organization) and EPO (European Patent Office). Its main competitors in its focus markets electrical machinery and energy, micro-structure and nano-technology and machines are PARAM CORP, IMS NANOFABRICATION GMBH and KRUIT PIETER.

Patent filings per year

Chart showing LEICA LITHOGRAPHY SYSTEMS LTDs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Hughes Barrie James 6
#2 King David Martin Platton 4
#3 Sturrock John Monro 3
#4 Zhang Tao 2
#5 George David Sydney 2
#6 Chisholm Thomas 2
#7 Dean Andrew 2
#8 Rosolen Grahame Craig 1
#9 Sturrock John Munro 1
#10 Mitchell Peter Gerald 1

Latest patents

Publication Filing date Title
GB9716388D0 Method of and machine for pattern writing by an electron beam
GB9710019D0 Electron beam aperture element
GB9708459D0 Pattern-writing machine
GB9600166D0 Electron beam pattern-writing column
US5786601A Electron beam lithography machine