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ULTRATECH STEPPER INC

Overview
  • Total Patents
    113
About

ULTRATECH STEPPER INC has a total of 113 patent applications. Its first patent ever was published in 1992. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and EPO (European Patent Office). Its main competitors in its focus markets optics, semiconductors and machine tools are V TECH CO LTD, BEIJING U PRECISIUM TECH CO LTD and BLATCHFORD JAMES WALTER.

Patent filings in countries

World map showing ULTRATECH STEPPER INCs patent filings in countries

Patent filings per year

Chart showing ULTRATECH STEPPER INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Talwar Somit 48
#2 Markle David A 37
#3 Hawryluk Andrew M 26
#4 Wang Yun 19
#5 Weiner Kurt 18
#6 Jeong Hwan J 18
#7 Thompson Michael O 15
#8 Verma Gaurav 10
#9 Kramer Karl-Joseph 7
#10 Kramer Karl-Josef 6

Latest patents

Publication Filing date Title
US6747245B2 Laser scanning apparatus and methods for thermal processing
WO03032081A1 Method and apparatus for optically defining an exposure exclusion region on a photosensitive workpiece
US6645838B1 Selective absorption process for forming an activated doped region in a semiconductor
US6635588B1 Method for laser thermal processing using thermally induced reflectivity switch
US6777833B1 Magnetic levitation stage apparatus and method
US6680774B1 Method and apparatus for mechanically masking a workpiece
US6777317B2 Method for semiconductor gate doping
US6617555B1 Imaging stabilization apparatus and method for high-performance optical systems
US6420264B1 Method of forming a silicide region in a Si substrate and a device having same
US6525805B2 Backside alignment system and method
US6753947B2 Lithography system and method for device manufacture
US6365476B1 Laser thermal process for fabricating field-effect transistors
US6635541B1 Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layer
US6479821B1 Thermally induced phase switch for laser thermal processing
US6324330B1 Folded light tunnel apparatus and method
US6347176B1 Acousto-optical light tunnel apparatus and method
US6303476B1 Thermally induced reflectivity switch for laser thermal processing
US6441514B1 Magnetically positioned X-Y stage having six degrees of freedom
US6380044B1 High-speed semiconductor transistor and selective absorption process forming same
US6274488B1 Method of forming a silicide region in a Si substrate and a device having same