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SEMICONDUCTOR SYSTEMS INC

Overview
  • Total Patents
    26
About

SEMICONDUCTOR SYSTEMS INC has a total of 26 patent applications. Its first patent ever was published in 1992. It filed its patents most often in United States, Japan and EPO (European Patent Office). Its main competitors in its focus markets semiconductors, optics and machines are BLATCHFORD JAMES WALTER, YAMAMOTO KEI and SEMICON TECH GLOBAL LTD.

Patent filings per year

Chart showing SEMICONDUCTOR SYSTEMS INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Biche Michael R 12
#2 Parodi Michael L 6
#3 Batchelder William T 4
#4 Hurtig Roy E 4
#5 Anderson H Alexander 3
#6 Maikeru Aaru Bitsushiyu 3
#7 Nguyen Vuong P 3
#8 Anderson Alexander 2
#9 Lurye Alexander 2
#10 Maikeru Eru Parodei 2

Latest patents

Publication Filing date Title
US5766824A Method and apparatus for curing photoresist
US5885661A Droplet jet method for coating flat substrates with resist or similar materials
JPH07254557A Method of heating and cooling semiconductor wafer and heating and cooling device
EP0653683A1 Oscillatory chuck method and apparatus for coating flat substrates
EP0634783A1 Thermal process module for substrate coat/develop system
EP0634699A1 Clustered photolithography system
US5392989A Nozzle assembly for dispensing liquid
US5472502A Apparatus and method for spin coating wafers and the like
US5427820A Thermal control line for delivering liquid to a point of use in a photolithography system
US5443348A Cassette input/output unit for semiconductor processing system
US5289222A Drain arrangement for photoresist coating apparatus