KR20200119607A
|
|
Slide type vaccum gate valve
|
KR20170120287A
|
|
Core Inductively Coupled Plasma Generator
|
KR20170053374A
|
|
Vacuum gate valve having powder-removal device
|
KR20170032690A
|
|
Remote Plasma Cleaning Method and Cleaning Apparatus
|
KR20170008391A
|
|
Plasma Apparatus Applied to the Broadband Pressure and the Cleaning Method Using
|
KR20160100022A
|
|
The Convergence Plasma Cleaning Appratus for the Vacuum Pump , Vacuum Line and PFC gases decomposition
|
KR20160100023A
|
|
The Convergence Plasma Cleaning Appratus
|
KR20160023382A
|
|
Liquid Delivery Apparatus and Method in The Vacuum System
|
KR20150144189A
|
|
Control system and method for project management in the smart work of cloud-based ECM
|
KR101548922B1
|
|
High-density plasma redemption source apparatus
|
KR101448449B1
|
|
Using a high-density plasma source perfluorocarbons redemption and harmful gas cracker
|
KR101527374B1
|
|
Remote radical cleaning and dry cleaning apparatus and method of using it
|
KR20150057663A
|
|
Using tandem plasma source for the plasma device degradation perfluorocarbon
|
KR101480340B1
|
|
Plasma ashing process apparatus with variety plasma and thereof ashing method
|
KR101450757B1
|
|
Plasma process apparatus with variety plasma and thereof method
|
KR20140124100A
|
|
The cloud based smartwork platform of the total integrated e-document management, for the small and medium orgarnization
|
KR20140091430A
|
|
Remotly Plasma Generator
|
KR101375539B1
|
|
Plasma igniter
|
KR20130134621A
|
|
Circuit of driving solenoid valve
|
KR20120140178A
|
|
Dry etching method of wafer backside using remote plasma generator
|