| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 14 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Electrical machinery and energy | |
| #3 | Measurement |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Optical systems | |
| #3 | Lighting device details | |
| #4 | Testing of structures | |
| #5 | Cameras |
| # | Name | Total Patents |
|---|---|---|
| #1 | Tanitsu Osamu | 14 |
| #2 | Tanaka Hirohisa | 4 |
| #3 | Shigematsu Koji | 3 |
| #4 | Hirota Hiroyuki | 3 |
| #5 | Matsuyama Tomoyuki | 3 |
| #6 | Komine Norio | 1 |
| #7 | Kudo Takehito | 1 |
| #8 | Mori Takashi | 1 |
| #9 | Nishinaga Hisashi | 1 |
| #10 | Kato Kinya | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2014233008A1 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | |
| US2009116093A1 | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method | |
| US2009073411A1 | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |