| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 16 |
| # | Name | Total Patents |
|---|---|---|
| #1 | Rueger Neal R | 16 |
| #2 | Sandhu Gurtej S | 4 |
| #3 | Williamson Mark J | 4 |
| #4 | Bian Zailong | 2 |
| #5 | Smythe John A Iii | 2 |
| #6 | Hill Chris W | 2 |
| #7 | Kramer Stephen J | 2 |
| #8 | Arrington Justin R | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2012048831A1 | Methods and apparatuses for energetic neutral flux generation for processing a substrate | |
| US2008143230A1 | Field emission devices and methods for making the same | |
| US2006042752A1 | Plasma processing apparatuses and methods | |
| US2006038293A1 | Inter-metal dielectric fill | |
| US2005221617A1 | Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases |