| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 8 | |
| #2 | Brazil | 4 | |
| #3 | WIPO (World Intellectual Property Organization) | 3 | |
| #4 | China | 2 | |
| #5 | Republic of Korea | 2 | |
| #6 | United States | 2 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Electrical machinery and energy | |
| #4 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Coating metallic material | |
| #2 | Semiconductor devices | |
| #3 | Electric discharge tubes | |
| #4 | Unspecified technologies |
| # | Name | Total Patents |
|---|---|---|
| #1 | Dickey Eric R | 17 |
| #2 | Danforth Bryan Larson | 8 |
| #3 | Eric R Dickey | 4 |
| #4 | Kon Masato | 3 |
| #5 | William A Barrow | 2 |
| #6 | Barrow William A | 2 |
| #7 | William Barrow | 1 |
| Publication | Filing date | Title |
|---|---|---|
| WO2020223737A2 | High voltage, low pressure plasma enhanced atomic layer deposition | |
| WO2020014631A1 | Water-insensitive methods of forming metal oxide films and products related thereto | |
| CN107210199A | High speed deposition mixed oxide barrier film | |
| BR112014000395A2 | mixed metal oxide barrier films and atomic layer deposition method for preparing mixed metal oxide barrier films | |
| EP2596146A2 | Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |