Method and device for homogeneously coating 3d substrates
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Process module for treating strip-shaped substrates
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Device for cutting and joining foil-like substrates
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Arrangement for the thermal processing of substrates
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Vaporization device for coating sheet-like substrates
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Assembly and method for performing a low temperature ALD process
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Process roller for receiving and guiding strip-shaped substrates in vacuum coating systems
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Arrangement for feeding HF current for tube cathodes
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Device for sputtering of substrates
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Device for producing multilayer systems on strip-shaped substrates
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Arrangement for tempering strip-shaped substrates
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Arrangement for gas separation and its use
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Indium target for sputtering devices and arrangement and method for producing such indium targets
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In-line vacuum coating system
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Method and device for structuring components using a material based on silicon oxide
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Procedure for the surface treatment of laminar substrates, comprises separating thin function layers from the substrates made of different materials, and carrying out thermal finishing treatment of separated layers on the substrate
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Method for producing a metallic shiny layer system on a substrate and use of the method
