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ANGSTRON SYSTEMS INC

Overview
  • Total Patents
    15
About

ANGSTRON SYSTEMS INC has a total of 15 patent applications. Its first patent ever was published in 2001. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Taiwan. Its main competitors in its focus markets surface technology and coating, semiconductors and electrical machinery and energy are SHANGHAI BETONE SEMICONDUCTOR ENERGY TECH CO LTD, SCHMID VACUUM TECHNOLOGY GMBH and LOTUS APPLIED TECH LLC.

Patent filings per year

Chart showing ANGSTRON SYSTEMS INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Leeser Karl F 15
#2 Chiang Tony P 15
#3 Brown Jeffrey A 5
#4 Babcoke Jason E 5

Latest patents

Publication Filing date Title
TW540093B Atomic layer deposition system and method
WO02081771A2 Atomic layer deposition system and method
TW511135B Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber
TW522473B Method and apparatus for improved temperature control in atomic layer deposition
AU3284402A System and method for modulated ion-induced atomic layer deposition (mii-ald)
US6630201B2 Adsorption process for atomic layer deposition
US2002144786A1 Substrate temperature control in an ALD reactor
US6428859B1 Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
US6416822B1 Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)