System for coating substrates with polycrystalline silicon, comprises many process chambers for coating substrates with amorphous silicon and at least one lock for injecting and discharging substrates in process chambers
DE102012108440A1
Film coating system comprises vacuum chamber in which film of reel-out roller is passed to coating roller via deflecting rollers, coating window, and unit for mechanically fixing coating window in horizontal operating position
DE102012108463A1
Film coating system comprises a vacuum chamber, an unwinding roller, a coating roller, a winding roller, an evaporator, and a guide roller, which is provided with a coating on its outer surface
DE102012108439A1
Film coating system comprises a vacuum chamber, a monitoring device, guide rollers, a coating roller, a winding roller, and an actuating device for varying the distance of a controllable actuator speed
DE102012108441A1
Film coating plant for packaging e.g. chips, has heated shells which are arranged between electrodes to receive clamping metal, and clamping device that is arranged within vacuum chamber to bias first electrode towards second electrode
DE102012106546A1
Pivot shaft, useful for vacuum chamber, comprises part that is arranged on shaft, movable first and second bearings, fixed third bearing, and fixed cooling head arranged after second and third bearing for supplying coolant to shaft
DE102012104013A1
High vacuum system and method for evacuation
DE102011113292A1
Vacuum feedthrough and vacuum coating device with vacuum feedthroughs
