Learn more

KLA TENCOR TECHNOLOGIES

Overview
  • Total Patents
    19
About

KLA TENCOR TECHNOLOGIES has a total of 19 patent applications. Its first patent ever was published in 1999. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and China. Its main competitors in its focus markets measurement, optics and semiconductors are KLA TENCOR TECH CORP, KLA TENCOR INC and ACCENT OPTICAL TECH INC.

Patent filings in countries

World map showing KLA TENCOR TECHNOLOGIESs patent filings in countries

Patent filings per year

Chart showing KLA TENCOR TECHNOLOGIESs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Fielden John 3
#2 Brown Kyle A 3
#3 Wack Dan 3
#4 Levy Ady 3
#5 Nikoonahad Mehrdad 3
#6 Bultman Gary 3
#7 Trikas Thanassis 2
#8 Mccauley Sharon 2
#9 Shinagawa Robert 2
#10 Lehman Kurt 2

Latest patents

Publication Filing date Title
US2005270524A1 Broadband wavelength selective filter
US6902855B2 Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patterns
US6882437B2 Method of detecting the thickness of thin film disks or wafers
US6930765B2 Multiple spot size optical profilometer, ellipsometer, reflectometer and scatterometer
US6646737B2 Submicron dimensional calibration standards and methods of manufacture and use
US6673637B2 Methods and systems for determining a presence of macro defects and overlay of a specimen
US6891167B2 Apparatus and method for applying feedback control to a magnetic lens
US6879391B1 Particle detection method and apparatus
US6690010B1 Chemical analysis of defects using electron appearance spectroscopy