Learn more

KLA TENCOR INC

Overview
  • Total Patents
    21
About

KLA TENCOR INC has a total of 21 patent applications. Its first patent ever was published in 1998. It filed its patents most often in WIPO (World Intellectual Property Organization), United States and Australia. Its main competitors in its focus markets measurement, optics and electrical machinery and energy are KLA TENCOR TECH CORP, KLA TENCOR TECHNOLOGIES and XINIX INC.

Patent filings in countries

World map showing KLA TENCOR INCs patent filings in countries

Patent filings per year

Chart showing KLA TENCOR INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Brown Kyle A 7
#2 Levy Ady 7
#3 Nikoonahad Mehrdad 5
#4 Wack Dan 5
#5 Fielden John 5
#6 Bultman Gary 5
#7 Rosengaus Eliezer 3
#8 Smedt Rodney C 3
#9 Chuang Yung-Ho 3
#10 Young Lydia J 2

Latest patents

Publication Filing date Title
US2006166385A1 Method for measuring peak carrier concentration in ultra-shallow junctions
US7301638B1 Dimensional calibration standards
US6796697B1 Illumination delivery system
WO03012828A2 Systems and methods for measuring properties of conductive layers
AU2002306430A1 Systems and methods for inspection of specimen surfaces
US6812045B1 Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation
EP1319244A1 Methods and systems for semiconductor fabrication processes
WO0197245A2 Sectored magnetic lens and method of use
WO0186698A2 Method and system for detecting metal contamination on a semiconductor wafer
WO0188955A2 Method of monitoring ion implants by examination of an overlying masking material
WO0184382A1 Methods and systems for lithography process control