| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 8 | |
| #2 | WIPO (World Intellectual Property Organization) | 4 | |
| #3 | EPO (European Patent Office) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Measurement | |
| #3 | Electrical machinery and energy | |
| #4 | Semiconductors |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Analysing materials | |
| #3 | Electric discharge tubes | |
| #4 | Semiconductor devices | |
| #5 | Optical systems | |
| #6 | Measuring light |
| # | Name | Total Patents |
|---|---|---|
| #1 | Litvak Herbert E | 6 |
| #2 | Leach Steven C | 5 |
| #3 | Thomson Mariste A | 5 |
| #4 | Rodgers Edward G | 4 |
| #5 | Rogers Edward G | 2 |
| #6 | Bogatin Eric | 1 |
| #7 | Fowler Jewett W | 1 |
| #8 | Chao Hung-Nan | 1 |
| #9 | Cadet Raymond J | 1 |
| #10 | Hui Sing-Wing | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US5166525A | Through the wafer optical transmission sensor | |
| US5138149A | Apparatus and method for monitoring radiant energy signals with variable signal gain and resolution enhancement | |
| US5196285A | Method for control of photoresist develop processes | |
| US5064269A | Light collection method and apparatus | |
| US5208644A | Interference removal | |
| US5012119A | Method and apparatus for monitoring particles using back-scattered light without interference by bubbles |