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RUDOLPH TECHNOLOGIES INC

Overview
  • Total Patents
    189
  • GoodIP Patent Rank
    71,625
About

RUDOLPH TECHNOLOGIES INC has a total of 189 patent applications. Its first patent ever was published in 1999. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Taiwan. Its main competitors in its focus markets measurement, semiconductors and optics are RAYTEX CORP, FINAROV MOSHE and THERMA WAVE INC.

Patent filings per year

Chart showing RUDOLPH TECHNOLOGIES INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Zhou Wei 14
#2 Donaher J Casey 13
#3 Strom John T 12
#4 Morath Christopher 11
#5 Mukundhan Priya 11
#6 Mehendale Manjusha 11
#7 Kotelyanskii Michael 11
#8 Mair Robin 10
#9 Sun Gang 9
#10 Watkins Cory 9

Latest patents

Publication Filing date Title
TW201923932A Wafer-level package assembly handling
TW201618208A Non-destructive acoustic metrology for void detection
TW201602552A Volumetric substrate scanner
US2014375983A1 Multiple measurement techniques including focused beam scatterometry for characterization of samples
US2016042987A1 Flexible handling system for semiconductor substrates
WO2014149213A1 Optical acoustic substrate assessment system and method
US2014110582A1 System for directly measuring the depth of a high aspect ratio etched feature on a wafer
WO2014107351A1 Edge grip substrate handler
WO2014055585A1 Blade for substrate edge protection during photolithography
SG11201502436SA Inspection of substrates using calibration and imaging
WO2013096660A1 On-axis focus sensor and method
US8659308B1 Selective overtravel during electrical test of probe cards
WO2012135513A1 Method of manufacturing semiconductor devices
TW201314831A Support for semiconductor substrate
WO2012040705A2 Support for semiconductor substrate
TW201213814A Inspection device with vertically moveable assembly
TW201140038A Infrared inspection of bonded substrates
WO2011044473A1 Substrate analysis using surface acoustic wave metrology
SG175097A1 Optical inspection optimization
TW201101400A Polarization imaging