| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 13 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Measurement | |
| #3 | Computer technology | |
| #4 | Electrical machinery and energy | |
| #5 | Semiconductors | |
| #6 | Environmental technology | |
| #7 | Chemical engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Vajaria Himanshu | 2 |
| #2 | Ries Bradley | 2 |
| #3 | Mahadevan Mohan | 2 |
| #4 | Chen David | 1 |
| #5 | Garcia Rudy | 1 |
| #6 | Nasser-Ghodsi Mehran | 1 |
| #7 | Fielden John | 1 |
| #8 | Macnaughton Craig | 1 |
| #9 | Chang Wei | 1 |
| #10 | Dighe Prasanna | 1 |
| Publication | Filing date | Title |
|---|---|---|
| EP3140638A1 | Illumination system, inspection tool with illumination system, and method of operating an illumination system |