Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn
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Method and apparatus for multi-pass, interleaved imaging with offline rasterization
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Tetrode electron gun for electron beam columns
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Method and apparatus for electron beam column assembly with precise alignment using displaced semi-transparent membranes
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Method and apparatus for hierarchical control of continuously operating systems
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Pyrometric dose correction for proximity heating of resists during electron beamlithography
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Alignment of low-energy electron beams using magnetic fields
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Apparatus and method for reducing charge accumulation on a substrate
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Microfabricated template for multiple charged particle beam calibrations and shielded charged particle beam lithography
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Stabilization of chemically amplified resist coating
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Method and apparatus for testing the function of a plurality of active microstructural elements and method for the production of active microstructural elements with such a method
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Annular differential seal for electron beam apparatus using isolation valve and additional differential pumping
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Detector configuration for efficient secondary electron collection in microcolumns
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Epicyclic stage
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Improved alignment of a thermal field emission electron source and application in a microcolumn
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Thermally balanced acousto-optic modulator
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Correction for systematic, low spatial frequency critical dimension variations in lithography
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Minimization of electron fogging in electron beam lithography
