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Epitaxial wafer, preparation method thereof and semiconductor device
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Epitaxial wafer production equipment
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Method for detecting temperature of temperature field of epitaxial furnace platform through ion-implanted chip and method for correcting temperature field of epitaxial furnace platform through ion-implanted chip
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Standard sheet for calibrating mercury-probe resistivity measuring instrument and mercury-probe resistivity measuring instrument calibration method
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Extremely thick epitaxial wafer for high-voltage power device, and method for manufacturing same
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Resistivity gradient distributed epitaxial wafer and production method thereof
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Epitaxial wafer, production method thereof and super junction power device
