| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 5 | |
| #2 | Japan | 3 | |
| #3 | Republic of Korea | 3 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Semiconductors | |
| #3 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Unspecified technologies | |
| #3 | Semiconductor devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Tsukihara Mitsukuni | 11 |
| #2 | Kabasawa Mitsuaki | 8 |
| #3 | Yagita Takanori | 6 |
| #4 | Sogabe Hiroshi | 4 |
| #5 | Fujii Yoshito | 3 |
| #6 | Matsushita Hiroshi | 3 |
| #7 | Yumiyama Toshio | 3 |
| #8 | Yakida Takanori | 3 |
| #9 | Amano Yoshitaka | 3 |
| #10 | Kuroda Takashi | 2 |
| Publication | Filing date | Title |
|---|---|---|
| JP2008269961A | Beam processor | |
| JP2008262756A | Ion implanting device and ion implantation method | |
| JP2007324487A | Beam processing apparatus and method |