| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 9 | |
| #2 | Taiwan | 4 | |
| #3 | United Kingdom | 1 | |
| #4 | United States | 1 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Semiconductors | |
| #3 | Machines | |
| #4 | Optics |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Semiconductor devices | |
| #3 | Electrography | |
| #4 | Unspecified technologies | |
| #5 | Unspecified technologies |
| # | Name | Total Patents |
|---|---|---|
| #1 | Tsukihara Mitsukuni | 9 |
| #2 | Kabasawa Mitsuaki | 7 |
| #3 | Yagita Takanori | 6 |
| #4 | Sogabe Hiroshi | 3 |
| #5 | Sato Masateru | 3 |
| #6 | Murata Hirohiko | 3 |
| #7 | Murakami Junichi | 3 |
| #8 | Kuroda Takashi | 2 |
| #9 | Amano Yoshitaka | 2 |
| #10 | Fujii Yoshito | 2 |
| Publication | Filing date | Title |
|---|---|---|
| EP1981059A2 | Ion implanation apparatus | |
| TW200809902A | Method of uniform generation of plasma in an ion source apparatus and an ion source apparatus |