Charged particle focusing system, electron microscopy system and electron microscopy method
DE10301579A1
Electron beam device and detector arrangement
DE10245052A1
Electron beam source and electron optical apparatus with one
DE10237297A1
Optical apparatus e.g. scanning electron microscope has controller which applies different excitation patterns to row of field source elements of lens assemblies
DE10237135A1
Particle optical device and method for operating the same
DE10237141A1
Beam guidance system, imaging method and electron microscopy system
DE10235981A1
Particle-optical device and electron microscope
DE10235455A1
Particle-optical device and method of operating the same
DE10235456A1
electron microscopy system
DE10233002A1
Objective lens for an electron microscopy system and electron microscopy system
DE10232689A1
Applications using charged particle beams
DE10230929A1
Method for electron microscopic observation of a semiconductor device and device therefor
DE10212807A1
Manipulator for an optical or particle-type optical device, e.g. the shutter of an electron microscope, has a connector, linking the component to a fixed mounting, which is made of material of anisotropic thermal conductivity
DE10211977A1
scanning Electron Microscope
DE10200645A1
Electron microscope with circular illumination aperture
DE10160402A1
Ionizing radiation apparatus comprises a pipe that contains optical components, and an epoxy resin outer coating that contains a heavy metal
DE10156275A1
Detector arrangement and detection method
CZ2003368A3
Detector for devices radiating corpuscular radiation, device radiating corpuscular radiation and method for detecting existence of products interaction within the device
DE10126698A1
Detector for varying pressure ranges and electron microscope with a corresponding detector
