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MACHINE TECHNOLOGY INC

Overview
  • Total Patents
    50
About

MACHINE TECHNOLOGY INC has a total of 50 patent applications. Its first patent ever was published in 1976. It filed its patents most often in United States, EPO (European Patent Office) and Canada. Its main competitors in its focus markets semiconductors, machines and surface technology and coating are MACH TECHNOL INC, TOKYO ELECTRON CO LTD and NIPPON ASM KK.

Patent filings in countries

World map showing MACHINE TECHNOLOGY INCs patent filings in countries

Patent filings per year

Chart showing MACHINE TECHNOLOGY INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Hillman Gary 22
#2 Rubin Richard H 9
#3 Rubin Richard Howard 5
#4 Heim Richard C 5
#5 Pawenski Scott M 4
#6 Lamont Jr Lawrence T 4
#7 Strahl Thomas L 4
#8 Petrone Benjamin J 4
#9 Mosely Roderick C 3
#10 Devico Michael J 3

Latest patents

Publication Filing date Title
CA2043266A1 Wafer transfer device
US5094884A Method and apparatus for applying a layer of a fluid material on a semiconductor wafer
US5114556A Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers
US4885075A Cooling device for a sputter target and source
US4856456A Apparatus and method for the fluid treatment of a workpiece
EP0276962A1 Cooling device for a sputter target and source
US4852516A Modular processing apparatus for processing semiconductor wafers
US4818561A Thin film deposition apparatus and method
US4776923A Plasma product treatment apparatus and methods and gas transport systems for use therein
US4756810A Deposition and planarizing methods and apparatus
US4717461A System and method for processing workpieces
US4722298A Modular processing apparatus for processing semiconductor wafers
US4711610A Balancing chuck
US4664935A Thin film deposition apparatus and method
US4673456A Microwave apparatus for generating plasma afterglows
DE3521896A1 FLEXIBLE WORKPIECE TRANSPORT DEVICE
EP0162703A2 Modular processing apparatus and modules for use therewith
US4685852A Process apparatus and method and elevator mechanism for use in connection therewith
US4674521A Rinsing apparatus and method
US4592926A Processing apparatus and method