CA2043266A1
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Wafer transfer device
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US5094884A
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Method and apparatus for applying a layer of a fluid material on a semiconductor wafer
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Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers
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Cooling device for a sputter target and source
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Apparatus and method for the fluid treatment of a workpiece
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EP0276962A1
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Cooling device for a sputter target and source
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US4852516A
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Modular processing apparatus for processing semiconductor wafers
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Thin film deposition apparatus and method
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Plasma product treatment apparatus and methods and gas transport systems for use therein
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Deposition and planarizing methods and apparatus
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System and method for processing workpieces
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Modular processing apparatus for processing semiconductor wafers
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US4711610A
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Balancing chuck
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Thin film deposition apparatus and method
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Microwave apparatus for generating plasma afterglows
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DE3521896A1
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FLEXIBLE WORKPIECE TRANSPORT DEVICE
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EP0162703A2
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Modular processing apparatus and modules for use therewith
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Process apparatus and method and elevator mechanism for use in connection therewith
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US4674521A
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Rinsing apparatus and method
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US4592926A
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Processing apparatus and method
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