Rear-side emitter solar cell structure with a heterojunction, as well as method and apparatus for producing the same
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Method for producing textured solar wafer
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Manufacturing process of silicon heterojunction solar cells with a stabilization step and a production line section for the stabilization step
CN110079782A
A kind of production facility and the method that coated substrate is manufactured in the production facility
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Membrane manufacturing plant
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Solar cell coating system
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Process module and system with at least one such process module
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Linear microwave plasma source with separate plasma spaces
DE102018113443A1
Plasma treatment apparatus with a linear microwave plasma source and a gas guiding device
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Ventilation device and vacuum production plant
DE102018111868A1
substrate carrier
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Vacuum flow system with high throughput
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Vacuum chamber and method for producing a vacuum chamber
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System for electrically decoupled, homogeneous temperature control of an electrode by means of heat pipes and processing plant with such a system
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Method of forming an adhesive and barrier layer on a substrate and associated substrate
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Device for transport of a substrate, treatment device with a holder plate adapted to a substrate holder of such a device and a method for processing a substrate using such a device for transporting a substrate and treatment plant
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Device for high temperature cvd with a stacking assembly made from gas distributors and support plates
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Heatable wafer-supporting member, and machining method
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Electrode unit with an internal electric network for feeding high frequency voltage and carrier assembly for a plasma processing system
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Crystalline solar cell having a transparent, conductive layer between the front contacts and method for manufacturing such a solar cell
