| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 21 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Medical technology | |
| #3 | Machines | |
| #4 | Semiconductors | |
| #5 | Electrical machinery and energy | |
| #6 | Machine tools | |
| #7 | Engines, pumps and turbines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Loopstra Erik Roelof | 21 |
| #2 | Swinkels Gerardus Hubertus Petrus Maria | 7 |
| #3 | Buurman Erik Petrus | 4 |
| #4 | Van Schoot Jan Bernard Plechelmus | 3 |
| #5 | Stamm Uwe Bruno Heini | 3 |
| #6 | Mulkens Johannes Catharinus Hubertus | 3 |
| #7 | Luttikhuis Bernardus Antonius Johannes | 2 |
| #8 | Wijckmans Maurice Willem Jozef Etienne | 2 |
| #9 | Banine Vadim Yevgenyevich | 2 |
| #10 | Pekelder Sven | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US2013141709A1 | Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method | |
| US2012026480A1 | Image-Compensating Addressable Electrostatic Chuck System | |
| US2008319569A1 | Lithographic projection apparatus and method for controlling a support structure | |
| US2007178704A1 | Lithographic apparatus and device manufacturing method for clamping a patterning device |