| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Semiconductors |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Semiconductor devices | |
| #3 | Cameras |
| # | Name | Total Patents |
|---|---|---|
| #1 | Shiraishi Kenichi | 11 |
| #2 | Fujiwara Tomoharu | 4 |
| #3 | Hoshika Ryuichi | 2 |
| #4 | Okumura Masahiko | 1 |
| #5 | Shirata Yosuke | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2009316120A1 | Exposure apparatus, cleaning method, and device fabricating method |