| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 14 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Medical technology | |
| #3 | Measurement | |
| #4 | Micro-structure and nano-technology | |
| #5 | Chemical engineering | |
| #6 | Engines, pumps and turbines | |
| #7 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | X-ray technique | |
| #3 | Nanostructure applications | |
| #4 | Unspecified technologies | |
| #5 | X-ray microscopes | |
| #6 | Measuring light | |
| #7 | Analysing materials | |
| #8 | Cameras | |
| #9 | Cleaning | |
| #10 | Optical systems |
| # | Name | Total Patents |
|---|---|---|
| #1 | Banine Vadim Yevgenyevich | 14 |
| #2 | Loopstra Erik Roelof | 5 |
| #3 | Moors Johannes Hubertus Josephina | 5 |
| #4 | Krivtsun Vladimir Mihailovitch | 3 |
| #5 | Van Herpen Maarten Marinus Johannes Wilhelmus | 2 |
| #6 | Smits Josephus Jacobus | 2 |
| #7 | Ivanov Vladimir Vitalevitch | 2 |
| #8 | Spee Carolus Ida Maria Antonius | 2 |
| #9 | Van Schoot Jan Bernard Plechelmus | 2 |
| #10 | Bakker Levinus Pieter | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US2014002805A1 | Electrostatic Clamp Apparatus And Lithographic Apparatus | |
| US2005254029A1 | Lithographic apparatus and device manufacturing method |