| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Japan | 19 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Measurement | |
| #3 | Machine tools | |
| #4 | Thermal processes |
| # | Name | Total Patents |
|---|---|---|
| #1 | Uwe Stamm | 9 |
| #2 | Kleinschmidt Juergen Dr | 7 |
| #3 | Igor Bragin | 3 |
| #4 | Klaus Vogler | 3 |
| #5 | Basting Dirk Dr | 3 |
| #6 | Heist Peter Dr | 3 |
| #7 | Rebhan Ulrich | 2 |
| #8 | Sergey V Govorkov | 2 |
| #9 | Zschocke Uwe | 2 |
| #10 | Voss Frank | 2 |
| Publication | Filing date | Title |
|---|---|---|
| JP2001044534A | Method for maintaining composition of discharge gas mixture for gas discharge laser and monitoring device | |
| JP2000286494A | Gas-discharge laser system and method for stabilizing state of mixed gas | |
| JP2000151002A | Performance control method for gas discharge laser | |
| JP2000106463A | Wavelength calibration method and system for excimer laser | |
| JP2000012946A | F2 laser capable of selecting spectral line and method for selecting spectral lines |