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LAMBDA PHYSIK GMBH

Overview
  • Total Patents
    98
About

LAMBDA PHYSIK GMBH has a total of 98 patent applications. Its first patent ever was published in 1979. It filed its patents most often in Germany, United States and Japan. Its main competitors in its focus markets optics, measurement and machine tools are CYMER LASER TECH, LAMBDA PHYSIK AG and QUINTESSENCE PHOTONICS CORP.

Patent filings in countries

World map showing LAMBDA PHYSIK GMBHs patent filings in countries

Patent filings per year

Chart showing LAMBDA PHYSIK GMBHs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Stamm Uwe 17
#2 Basting Dirk 11
#3 Lokai Peter 9
#4 Stamm Uwe Dipl Phys Dr 7
#5 Vos Frank Dr 7
#6 Basting Dirk Dr 7
#7 Zschocke Wolfgang 6
#8 Voss Frank 6
#9 Govorkov Sergei V 6
#10 Kleinschmidt Juergen Dr 6

Latest patents

Publication Filing date Title
DE19950124A1 Molecular fluorine laser, useful for vacuum ultraviolet lithography, has a resonator comprising an etalon with maximum reflectivity for a selected emission line
US6160832A Method and apparatus for wavelength calibration
DE19942455A1 Power control method for gas discharge laser comprises comparing property of laser output beam as function of voltage applied to discharge chamber for optimal, current gas mixture states
US6198761B1 Coaxial laser pulser with solid dielectrics
US6219368B1 Beam delivery system for molecular fluorine (F2) laser
US6157662A F2 (157nm) laser employing neon as the buffer gas
US6160831A Wavelength calibration tool for narrow band excimer lasers
DE19845498A1 Cleaning surface of optical element of laser, especially window of laser tube, involves directing laser beam from laser towards surface to be cleaned by deflection
US6014206A Stabilization of angular and lateral laser beam position
US6002697A Diode pumped laser with frequency conversion into UV and DUV range
DE19837227A1 Arrangement to reduce fouling of window of gas discharge laser; has heating arrangement to heat at least part of inner surface of window above temperature of laser gas in laser tubes
US6081542A Optically pumped laser with multi-facet gain medium
US6061382A Laser system and method for narrow spectral linewidth through wavefront curvature compensation
US5946337A Hybrid laser resonator with special line narrowing
DE19734715A1 Device for rinsing pathway of ultraviolet laser beam
US6020723A Magnetic switch controlled power supply isolator and thyristor commutating circuit
US6005880A Precision variable delay using saturable inductors
DE19705330C1 Laser pulse generation method for solid state resonator in optoelectronics
DE19634161A1 Method of adjusting and sourceing narrowband coherent radiation
US5796513A Laser arrangement for generating narrow-band, tunable coherent radiation