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CYMER INC

Overview
  • Total Patents
    1,396
  • GoodIP Patent Rank
    206,322
About

CYMER INC has a total of 1,396 patent applications. Its first patent ever was published in 1993. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and EPO (European Patent Office). Its main competitors in its focus markets optics, medical technology and measurement are LAMBDA PHYSIK G ZUR HERSTELLUN, LAMBDA PHYSIK AG and Cymer LLC.

Patent filings per year

Chart showing CYMER INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Partlo William N 480
#2 Ershov Alexander I 371
#3 Fomenkov Igor V 359
#4 Sandstrom Richard L 326
#5 Das Palash P 236
#6 Ness Richard M 162
#7 Morton Richard G 127
#8 Ujazdowski Richard C 123
#9 Brown Daniel J W 94
#10 Hofmann Thomas 92

Latest patents

Publication Filing date Title
US8680495B1 Extreme ultraviolet light source
US8791440B1 Target for extreme ultraviolet light source
US8624209B1 Controlling spatial properties in an excimer ring amplifier
US2014233005A1 System and method for adjusting seed laser pulse width to control EUV output energy
US2014191133A1 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
US2014191132A1 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
US2013322482A1 System and method for protecting a seed laser in an EUV light source with a Bragg AOM
WO2013101374A1 System and method for extending gas life in a two chamber gas discharge laser system
WO2013095858A1 Filter for material supply apparatus
US2014102881A1 Method of and apparatus for in-situ repair of reflective optic
US8563956B1 Intracavity loss element for power amplifier
US2014098413A1 Harsh environment optical element protection
CN103620891A System and method for automatic gas optimization in a two-chamber gas discharge laser system
WO2012091786A1 Multi-pass optical apparatus
WO2011162903A1 Master oscillator-power amplifier drive laser with pre-pulse for euv light source
WO2011130327A1 Systems and methods for cooling an optic
CN102822903A Systems and method for target material delivery protection in a laser produced plasma EUV light source
US2012248341A1 System and method for compensating for thermal effects in an EUV light source
CN102576974A Advanced laser wavelength control
JP2010182698A Extreme ultraviolet light source