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Pulse power generating circuit with energy recovery
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Beam diverting shutter for a laser beam
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Gas replenishment method and apparatus for excimer lasers
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Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby
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Method and apparatus for calibrating a laser wavelength control mechanism
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Excimer laser
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Apparatus for, and method of, maintaining a clean window in a laser
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Pre-ionizer for a laser
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Spectral narrowing technique
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Compact excimer laser
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Compact excimer laser
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Compact excimer laser
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Compact excimer laser
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Compact excimer laser
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Compact excimer laser
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Compact excimer laser
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System for, and method of, regulating the wavelength of a light beam
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Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
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