| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 12 | |
| #2 | Japan | 1 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Medical technology | |
| #3 | Micro-structure and nano-technology | |
| #4 | Engines, pumps and turbines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Wakabayashi Osamu | 13 |
| #2 | Kumazaki Takahito | 5 |
| #3 | Yanagida Tatsuya | 3 |
| #4 | Ariga Tatsuya | 3 |
| #5 | Sasano Kotaro | 3 |
| #6 | Yoshino Masaya | 2 |
| #7 | Shinbori Masashi | 2 |
| #8 | Suzuki Toru | 2 |
| #9 | Endo Akira | 1 |
| #10 | Nowak Krzysztof | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2012305811A1 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | |
| US2012248344A1 | Extreme ultraviolet light generation system utilizing a variation value formula for the intensity | |
| JPS63207342A | Rat zorozoro (trap) |