| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 15 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Measurement |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Measuring electric variables |
| # | Name | Total Patents |
|---|---|---|
| #1 | Feustel Frank | 15 |
| #2 | Werner Thomas | 8 |
| #3 | Frohberg Kai | 7 |
| #4 | Letz Tobias | 5 |
| #5 | Koschinsky Frank | 2 |
| #6 | Bartsch Christin | 1 |
| #7 | Ott Andreas | 1 |
| #8 | Huebler Peter | 1 |
| #9 | Peters Carsten | 1 |
| #10 | Hau-Riege Christine | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2010289125A1 | Enhanced electromigration performance of copper lines in metallization systems of semiconductor devices by surface alloying |