Replacing method for rare gas in heat treatment equipment of semiconductor wafer
JPH0415915A
Method and apparatus for heat treatment of semiconductor wafer
JPH03272133A
Carriage of wafer boat and device thereof
JPH0379985A
Controlling method for temperature of electric furnace
JPH031066A
Cooling system in heat treatment furnace
JPH02307216A
Vertical heat treating apparatus for semiconductor article
JPH02194624A
Apparatus for treating semiconductor under reduced pressure
JPH025520A
Vertical semiconductor heat treatment device
JPH01309317A
Wafer-boat conveying apparatus and protector replacing apparatus
JPS63284787A
Strand heater and semiconductor heat treatment device
JPS63283019A
Heat treating device for multiple structured vertical semiconductor
JPS63166218A
Wafer cooling method for semiconductor thermal processing equipment
JPS63128624A
Method of carrying in and out wafer boat in vertical semiconductor heat treatment system
JPS63102225A
Wafer boat for vertical type semiconductor thermal treatment equipment
JPS6381815A
Heat treatment apparatus
JPS62276824A
Outside-air inclusion preventive device for vertical type semiconductor thermal treatment equipment
JPS62290126A
Method for carrying semiconductor substrate in and out of vertical type semiconductor thermal treatment equipment and outside-air mixing preventive device
