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Plasma reactor with filaments and rf power applied at multiple frequencies
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Plasma reactor with phase shift applied across electrode array
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Plasma reactor with groups of electrodes
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Symmetric VHF plasma power coupler with active uniformity steering
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Plasma reactor with tiltable overhead RF inductive source
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Plasma reactor with ion distribution uniformity controller employing plural vhf sources
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Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes
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Process for wafer backside polymer removal with wafer front side gas purge
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Process for wafer backside polymer removal and wafer front side scavenger plasma
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Process for wafer backside polymer removal with a plasma stream
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