| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 9 | |
| #2 | China | 3 | |
| #3 | EPO (European Patent Office) | 3 | |
| #4 | Republic of Korea | 3 | |
| #5 | Taiwan | 3 | |
| #6 | WIPO (World Intellectual Property Organization) | 3 | |
| #7 | Japan | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Chemical engineering | |
| #3 | Machines | |
| #4 | Packaging and shipping | |
| #5 | Control | |
| #6 | Environmental technology | |
| #7 | Furniture and games |
| # | Name | Total Patents |
|---|---|---|
| #1 | Rebstock Lutz | 24 |
| #2 | Lutz Rebstock | 1 |
| Publication | Filing date | Title |
|---|---|---|
| JP2020053691A | Recirculating substrate container purging system and method | |
| TW201724325A | Method and system for forming a clean environment for semiconductor substrates with low humidity level | |
| CN105849887A | Recirculation substrate container purging systems and methods | |
| US2016303622A1 | Cleaning Systems and Methods for Semiconductor Substrate Storage Articles |