| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 3 | |
| #2 | Canada | 2 | |
| #3 | China | 2 | |
| #4 | Republic of Korea | 2 | |
| #5 | Taiwan | 2 | |
| #6 | Germany | 1 | |
| #7 | Singapore | 1 | |
| #8 | United States | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Optics | |
| #3 | Chemical engineering |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Photomechanical semiconductor production | |
| #3 | Cleaning |
| # | Name | Total Patents |
|---|---|---|
| #1 | Dress Peter | 9 |
| #2 | Dietze Uwe | 5 |
| #3 | Gairing Thomas | 4 |
| #4 | Sowa Michael | 4 |
| #5 | Branz Karsten | 4 |
| #6 | Sing Sherjang | 3 |
| #7 | Peter Dress | 3 |
| #8 | Saule Werner | 2 |
| #9 | Michael Sowa | 2 |
| #10 | Thomas Gairing | 2 |
| Publication | Filing date | Title |
|---|---|---|
| DE102007031314A1 | Method and device for drying a surface of a substrate |