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TEL FSI INC

Overview
  • Total Patents
    141
  • GoodIP Patent Rank
    12,781
  • Filing trend
    ⇩ 11.0%
About

TEL FSI INC has a total of 141 patent applications. It decreased the IP activity by 11.0%. Its first patent ever was published in 2007. It filed its patents most often in United States, Taiwan and Republic of Korea. Its main competitors in its focus markets semiconductors, chemical engineering and machines are XI AN WEIZHENG ELECTRONIC SCIENCE & TECHNOLOGY CO LTD, PLANAR SEMICONDUCTOR INC and WUXI HUAYING MICROELECTRONIC TECHNOLOGY CO LTD.

Patent filings in countries

World map showing TEL FSI INCs patent filings in countries

Patent filings per year

Chart showing TEL FSI INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Butterbaugh Jeffery W 34
#2 Lauerhaas Jeffrey M 24
#3 Rose Alan D 23
#4 Mbanaso Chimaobi W 22
#5 Dekraker David 22
#6 Inhofer William P 18
#7 Siefering Kevin L 17
#8 Becker David Scott 14
#9 Collins Jimmy D 14
#10 Gast Tracy A 14

Latest patents

Publication Filing date Title
US2020148534A1 Method for achieving stiction-free high-aspect-ratio microstructures after wet chemical processing
US2020161124A1 Treatment systems with repositionable nozzle useful in the manufacture of microelectronic devices
US2020020566A1 Magnetic Integrated Lift Pin System for a Chemical Processing Chamber
US2019337026A1 System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
US2019291144A1 Pressure Control Strategies to Provide Uniform Treatment Streams in the Manufacture of Microelectronic Devices
CN111937128A Microelectronic processing system with controllable beam size processing spray
CN111183506A System and method for processing a substrate with a cryogenic fluid mixture
WO2019035920A1 Apparatus for spraying cryogenic fluids
US2018269080A1 System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
US2018214915A1 Systems and methods for rotating and translating a substrate in a process chamber
US2018190517A1 Recipe selectable dispense system and method of operating
CN110050336A Waffer edge lift pin for manufacturing semiconductor device designs
TW201834112A Translating and rotating chuck for processing microelectronic substrates in a process chamber
KR20190069595A A magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber
US2018025904A1 Systems and Methods for Treating Substrates with Cryogenic Fluid Mixtures
US2017341093A1 Apparatus for spraying cryogenic fluids
TW201801163A Systems and methods for treating substrates with cryogenic fluid mixtures
US2016303617A1 Systems and methods for treating substrates with cryogenic fluid mixtures
TW201624533A Systems and methods for treating substrates with cryogenic fluid mixtures
US2016013068A1 Process for silicon nitride removal selective to SiGex