Device for producing extreme UV radiation based on gas discharge plasma, has stripper including blowing elements i.e. grooves, and boundary at legs so that stripper is axially adjustable, where grooves are formed in rotation direction
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Method and device for adjusting properties of a beam of high-energy radiation emitted from a plasma
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Method for the spatially resolved measurement of parameters in a cross section of a beam of high-energy, high-intensity radiation
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Method and apparatus for generating EUV radiation from a gas discharge plasma
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Foil trap device with improved heat resistance
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Arrangement for the continuous production of liquid tin as emitter material in EUV radiation sources
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Method and arrangement for operating plasma-based short-wave radiation sources
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Arrangement for debris suppression in a plasma-based radiation source for generating short-wave radiation
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Arrangement for generating EUV radiation
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Method and arrangement for cleaning optical surfaces in plasma-based radiation sources
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Device for generating a gas curtain for plasma-based EUV radiation sources
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Arrangement for switching large electrical currents via a gas discharge
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Apparatus and method for generating extreme ultraviolet radiation by means of an electrically operated gas discharge
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Narrow-band transmission filter for EUV radiation
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Method and arrangement for stabilizing the mean emitted radiation power of a pulsed operated radiation source
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Method for pulse energy regulation of gas discharge radiation sources
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Extreme ultraviolet radiation generating arrangement for semiconductor lithography, has electrodes immersed into containers, directed into vacuum chamber and re-guided into containers after electrical discharge between electrodes
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Arrangement for generating EUV radiation based on a gas discharge plasma
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Arrangement for generating extreme ultraviolet radiation from an energy beam generated plasma with high conversion efficiency and minimal contamination
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Extreme ultraviolet radiation generating device for use in extreme ultraviolet lithography, has high voltage supply unit comprising capacitor battery, which consists of capacitor units that are arranged along round rings
