| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 20 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Medical technology | |
| #3 | Engines, pumps and turbines | |
| #4 | Micro-structure and nano-technology |
| # | Name | Total Patents |
|---|---|---|
| #1 | Moriya Masato | 20 |
| #2 | Wakabayashi Osamu | 16 |
| #3 | Sumitani Akira | 5 |
| #4 | Abe Tamotsu | 5 |
| #5 | Soumagne Georg | 4 |
| #6 | Suganuma Takashi | 3 |
| #7 | Hayashi Hideyuki | 2 |
| #8 | Ueno Yoshifumi | 2 |
| #9 | Someya Hiroshi | 2 |
| #10 | Yabu Takayuki | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US2009314967A1 | Extreme ultra violet light source apparatus | |
| US2009267003A1 | Semiconductor exposure device using extreme ultra violet radiation |