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Extreme ultraviolet source with magnetic cusp plasma control
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US2016242268A1
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Extreme ultraviolet source with magnetic cusp plasma control
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US2016150625A1
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Extreme ultraviolet source with dual magnetic cusp particle catchers
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US9155178B1
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Extreme ultraviolet source with magnetic cusp plasma control
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Lithium extreme ultraviolet source and operating method
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JP2012146637A
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Pulsed discharge extreme ultraviolet source with magnetic shield
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US2011089834A1
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Z-pinch plasma generator and plasma target
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WO2009105247A1
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Laser heated discharge plasma euv source with plasma assisted lithium reflux
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WO2009073116A1
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Laser heated discharge plasma euv source
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US2007158595A1
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Extreme ultraviolet source with wide angle vapor containment and reflux
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US2006102663A1
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Liquid metal droplet generator
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EP1664930A2
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Optically addressed extreme ultraviolet modulator and lithography system incorporating modulator
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US2005178985A1
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Injection pinch discharge extreme ultraviolet source
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CN1539254A
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Star pinch x-ray and extreme ultraviolet photon source
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US2002186814A1
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Star pinch X-ray and extreme ultraviolet photon source
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WO0178469A2
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Z-pinch plasma x-ray source using surface discharge preionization
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US6421421B1
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Extreme ultraviolet based on colliding neutral beams
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Z-pinch soft x-ray source using diluent gas
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